“Nanofabrication Lecture Series” New Technologies in Nanofabrication

“Nanofabrication Lecture Series”
Co-Hosted by Rutgers (ORA and MERL) and Carl Zeiss
Date: Wednesday July 10, 2013
Time: 11 :OO AM to 12:00 PM


11:00-11:30  –  “Advanced Gallium Focused Ion Beam Applications”
11:30-12:00  –  “Helium and Neon FIB Microscopy for Sub-10nm Nanofabrication Applications”
12:00-12:30  –  Light Lunch
12:30 (Optional)  –  Tour of Microelectronics Research Laboratory (MERL)

Reserve your spot at bit.ly/nano-fabrication

About the Rutgers Microelectronics Research Laboratory

The Microelectronics Research Laboratory closely works with researchers in academic, government and industry to help solve problems in multidisciplinary science and engineering and high-tech industry, to train students and to carry out advanced research in micro- and nano-optoelectronics, solid state devices and electronic materials. The capabilities of the laboratory include a dry processing area for plasma processing, thin film metallization and dielectric, thermal processing, ultraviolet lithography, nano-imprint and most recently atomic layer deposition.  merl.rutgers.edu

Nanofabrication Lecture Series-July 10 2013-RU-Zeiss


Busch Campus Center, Center Hall
604 Bartholomew Road
Piscataway, NJ 08854


David Sadowski
Office of Research Alliances (ORA)
Rutgers, The State University of New Jersey

Warren Lai
Microelectronics Research Laboratory (MERL)
Rutgers, The State University of New Jersey

Gary Zimberg
Carl Zeiss


Special event parking has been made available to visitors in the following lots. Permits will not be required:



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